JPS6184551U - - Google Patents
Info
- Publication number
- JPS6184551U JPS6184551U JP16801684U JP16801684U JPS6184551U JP S6184551 U JPS6184551 U JP S6184551U JP 16801684 U JP16801684 U JP 16801684U JP 16801684 U JP16801684 U JP 16801684U JP S6184551 U JPS6184551 U JP S6184551U
- Authority
- JP
- Japan
- Prior art keywords
- radiation
- inspection device
- radiation source
- inspected
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000005855 radiation Effects 0.000 claims 4
- 238000007689 inspection Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16801684U JPS6184551U (en]) | 1984-11-07 | 1984-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16801684U JPS6184551U (en]) | 1984-11-07 | 1984-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6184551U true JPS6184551U (en]) | 1986-06-04 |
Family
ID=30725800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16801684U Pending JPS6184551U (en]) | 1984-11-07 | 1984-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6184551U (en]) |
-
1984
- 1984-11-07 JP JP16801684U patent/JPS6184551U/ja active Pending